Contact structure and associated method for flash memory

ABSTRACT

A semiconductor device includes a substrate structure comprising an active region, a first interlayer dielectric layer on the active region, and a first opening in the first interlayer dielectric layer and extending to the active region, at least one gate structure in the first opening and comprising spacers on sidewalls of the first opening, a gate dielectric layer on the active region, a metal gate on the gate dielectric layer, and a hardmask on the metal gate and having a first recess in a middle portion of its upper surface, the gate dielectric layer, the metal gate, and the hardmask being between the spacers, a second interlayer dielectric layer on the first dielectric layer and on at least a portion of the hardmask, and a second opening adjacent to the at least one gate structure in the first opening and exposing the spacers and a surface of the active region.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a continuation application of U.S. patentapplication Ser. No. 15/624,846, filed on Jun. 16, 2017, which claimspriority to Chinese Patent Application No. 201610516625.2, filed withthe State Intellectual Property Office of People's Republic of China onJul. 4, 2016, the contents of which are incorporated herein by referencein its entirety.

FIELD OF THE INVENTION

The present invention relates to semiconductor technology, and moreparticularly to a semiconductor device having a contact structure andmanufacturing method thereof.

BACKGROUND OF THE INVENTION

As technology nodes continue to evolve, the size of contacts becomessmaller. Self-aligned contact (SAC) processes are required for currentmainstream technology nodes and for future smaller-sized nodes. Inparticular, for logic devices and flash memory devices (e.g., NOR flashmemory devices), SAC processes are required with the decreasing size intechnology nodes.

FIG. 1A is a cross-sectional view of a contact hole etched in aconventional flash memory device. The flash memory device may include asemiconductor substrate 100 and a gate structure on semiconductorsubstrate 100. The gate structure may include a gate insulating layer101, a charge storage layer 103 on gate insulating layer 101, aninterlayer dielectric (also referred to as inter-gate dielectric) layer105 on charge storage layer 103, a gate 107 on interlayer dielectriclayer 105, and a hardmask 109 on gate 107. Flash memory device 10 mayfurther include spacers 111 on opposite sides of gate 107 and optionallya mask layer 113 on the gate structure and the substrate. FIG. 1B is anideal case of etching a contact hole for a contact to an active regionin the flash memory device. As shown in FIG. 1A, an interlayerdielectric layer 115 is formed on mask layer 113, or, in other cases, onthe gate structure and the substrate. Thereafter, an SAC etching of thecontact hole is performed using a patterned mask layer 117 (e.g.,photoresist) formed on interlayer dielectric layer 115 extending to theactive region (a portion of substrate 100) to form a contact hole 119.

The etch selectivity of the etch process to etch the contact hole ischaracterized by the ratio of an etch rate of the interlayer dielectriclayer (e.g., silicon oxide) relative to the etch rate of the hardmask onthe gate (as well as additional sidewalls or sidewall spacers, if any)(e.g., silicon nitride). Ideally, as shown in FIG. 1B, the etchselectivity of the etch process to etch the contact hole is so selectedthat hardmask 109 remains on gate 107 and spacers 111 remain onsidewalls of gate 107, thereby protecting gate 107.

However, as the size of technology nodes shrinks, the change of the etchselectivity becomes an important consideration for etching. FIGS. 1C and1D illustrate an example of problems in the flash memory device of FIG.1A in current SAC processes, particularly, in SAC processes in flashmemory devices.

When the etch selectivity of the etch process to etch the contact holeis insufficient, hardmask 109 will be excessively etched and sidewallspacers 111 and/or mask layer 113 will also be consumed, therebyexposing gate 107 causing a short circuit between the gate and thecontact in the contact hole, as indicated by the dotted circle in FIG.1C.

On the other hand, when the etch selectivity of the etch process to etchthe contact hole is too high, a portion of interlayer dielectric layer115 and mask layer 113 (if any) may remain in the contact hole to beformed with resulting risk an open circuit, as shown in FIG. 1D.

For some semiconductor devices, such as flash memory devices (e.g., NORflash memory devices), due to their high aspect ratio and/or the viasand trenches formed in a single contact hole etch, the above-describedproblems will become more severe. For logic devices, the problems aresimilar when SAC processes are used.

Thus, a novel semiconductor device structure and manufacturing methodthereof are needed to solve the above-described problems.

BRIEF SUMMARY OF THE INVENTION

Embodiments of the present invention provide a method for manufacturinga semiconductor device. The method may include providing a substratestructure including a semiconductor substrate having an active region,at least one gate structure on the active region and including a gatedielectric layer on the active region, a gate portion on the gatedielectric layer, and a hardmask on the gate; forming a first dielectriclayer on the at least one gate structure and a surface of the activeregion adjacent to the at least one gate structure, wherein a portion ofthe first dielectric layer on the hardmask and the hardmask form a maskmember; forming a second dielectric layer on the first dielectric layercovering the at least one gate structure; performing a surface treatmenton the second dielectric layer so that an upper surface of the seconddielectric layer is flush with an upper surface of the mask member and afirst recess is formed in a middle portion of the upper surface of themask member; forming a third dielectric layer on the second dielectriclayer covering the mask member; and selectively etching the thirddielectric layer and the second dielectric layer relative to the firstdielectric layer and the mask member to form an opening adjacent to theat least one gate structure, the opening exposing a portion of the firstdielectric layer on sidewalls of the at least one gate structure and aportion of the first dielectric layer on the active region adjacent tothe at least one gate structure.

In one embodiment, the selectively etching further etches an upperportion of the mask member and a portion of the first dielectric layeron the sidewalls of the mask member adjacent to the opening to form asecond recess.

In one embodiment, the selectively etching causes a portion of the uppersurface of the mask member away from the opening to be higher than aremaining portion of the mask member, and a portion of the upper surfaceof the mask member in a vicinity of the opening to be lower than abottom of the first recess of the mask member.

In one embodiment, the mask member is configured such that, afterperforming the surface treatment, a ratio of a thickness of a portion atthe bottom of the first recess in the mask member to a thickness of thesecond dielectric layer at the same level of the first recess bottom isgreater than an etch selectivity ratio of a material of the mask memberto a material of the second dielectric layer.

In one embodiment, the at least one gate structure includes two adjacentgate structures, the first dielectric layer being formed to cover thetwo adjacent gate structures and a surface of the active region betweenthe two adjacent gate structures. Forming the second dielectric layerincludes filling an air gap between the two adjacent gate structures.The opening is disposed between the two adjacent gate structuresexposing a portion of the first dielectric layer on the active regionbetween the two adjacent gate structures.

In one embodiment, providing the substrate structure includes formingthe gate dielectric layer on the semiconductor substrate, forming acharge storage layer on the gate dielectric layer, forming anintermediate dielectric layer on the charge storage layer, forming afirst gate layer on the intermediate dielectric layer, forming ahardmask layer on the first gate layer, and etching the hardmask layer,the first gate layer, the intermediate dielectric layer, the chargestorage layer, and the gate dielectric layer to form the at least onegate structure. The gate portion includes a charge storage portion onthe gate dielectric layer, the intermediate dielectric layer on thecharge storage portion, and the first gate layer on the intermediatedielectric layer.

In one embodiment, providing the substrate structure includes formingthe gate dielectric layer on the semiconductor substrate, forming asecond gate layer on the gate dielectric layer, forming a hardmask layeron the second gate layer, etching the hardmask layer, the second gatelayer, and the gate dielectric layer to form the at least one gatestructure. The gate portion includes the second gate layer on the gatedielectric layer.

In one embodiment, performing the surface treatment includes planarizingthe second dielectric layer to expose the upper surface of the maskmember, and etching back the exposed upper surface to form the firstrecess.

In one embodiment, performing the surface treatment includes performingan over polish on the second dielectric layer using a chemicalmechanical polishing process.

In one embodiment, selectively etching the third dielectric layer andthe second dielectric layer includes performing a dry or wet scanning, ananoprinting, or self-assembly process using a patterned mask.

In one embodiment, selectively etching the third dielectric layer andthe second dielectric layer includes performing a dry plasma etchingbased on a fluorocarbon (CxFy), x and y being positive number, whereinthe etch ratio of the third and second dielectric layers to the hardmaskand/or the first dielectric layer is greater than 1 and less than orequal to 10.

In one embodiment, the method may further include removing a portion ofthe exposed first dielectric layer on a portion of the active region toexpose a surface of the active region; and forming a contact memberextending to the exposed surface of the active region.

In one embodiment, the first dielectric layer and the hardmask include asame material.

In one embodiment, the semiconductor device includes a flash memory cellincluding the at least one gate structure. In one embodiment, the activeregion is a fin-shaped active region.

In one embodiment, the charge storage portion is a floating gate or asilicon oxide-silicon nitride-silicon oxide stacked structure.

Embodiments of the present invention also provide a semiconductordevice. The semiconductor device may include a substrate structure. Thesubstrate structure includes a semiconductor substrate including anactive region; at least one gate structure on the active region andcomprising a gate dielectric layer on the active region, a gate portionon the gate dielectric layer, and a mask member on the gate portion; anda first dielectric layer on sidewalls of the at least one gate structureThe substrate structure also includes an opening adjacent to the atleast one gate structure and exposing the first dielectric layer onsidewalls of the at least one gate structure and a surface portion ofthe active region adjacent to the at least one gate structure. The maskmember includes a first recess in a meddle portion of its upper surface.

In one embodiment, the semiconductor device further includes a secondrecess formed on a portion of the upper portion of the mask memberadjacent to the opening and a portion of an upper portion of the firstdielectric layer on the sidewalls of the mask member adjacent to theopening.

In one embodiment, a portion of the upper surface of the mask memberaway from the opening is higher than a remaining portion of the uppersurface of the mask member, and a portion of an upper surface of themask member in a vicinity of the opening is lower than a bottom in themiddle portion of the first recess.

In one embodiment, the mask member is configured such that a ratio of athickness of a portion of the upper surface of the mask member at thebottom of the first recess to a thickness of a portion of the seconddielectric layer at a same level of the upper surface of the mask memberis greater than an etch selectivity ratio of a material of the maskmember to a material of the second dielectric layer.

In one embodiment, the at least one gate structure comprises twoadjacent gate structures, and the opening exposes a surface of the firstdielectric layer disposed between the two adjacent gate structures and asurface of the active region disposed between the two adjacent gatestructures.

In one embodiment, the semiconductor device further includes a contactmember filling the opening and extending to the exposed surface portionof the active region.

In one embodiment, the semiconductor device may further include a flashmemory cell having the at least one gate structure.

In one embodiment, the active region is a fin-shaped active region.

In one embodiment, the gate portion includes a charge storage portion onthe gate dielectric layer, an intermediate dielectric layer on thecharge storage portion, and the first gate layer on the intermediatedielectric layer.

In one embodiment, the charge storage portion is a floating gate or asilicon oxide-silicon nitride-silicon oxide stacked structure.

In one embodiment, the gate portion includes a second gate layer on thegate dielectric layer.

Some embodiments of the present invention also provide a method formanufacturing a semiconductor device. The method may include providing asubstrate structure including an active region and a first interlayerdielectric layer on the active region, the first interlayer dielectriclayer including at least one opening extending to the active region, thesubstrate structure further including spacers on sidewalls of the atleast one opening and a gate dielectric layer in the at least oneopening and on the active region; forming a metal gate material layer onthe substrate structure to fill the at least one opening; and etchingback the metal gate material layer to form a metal gate in the at leastone opening and on the gate dielectric layer. The method also mayinclude, after forming the metal gate, forming a hardmask material layerto fill the at least one opening; processing the hardmask material layerto form a hardmask on the metal gate, the hardmask having an uppersurface including a first recess in a middle portion of the hardmask, sothat at least one gate structure including the gate dielectric layer,the metal gate, the hardmask and the spacers is formed in the at leastone opening; forming a second interlayer dielectric layer on thesubstrate structure including the hardmask; and selectively etching thesecond interlayer dielectric layer and the first interlayer dielectriclayer with respect to the spacers and the hardmask to form a secondopening adjacent to the at least one opening, the second openingexposing the spacers of the at least one gate structure and a surface ofthe active region adjacent to the at least one gate structure.

In one embodiment, selectively etching the second interlayer dielectriclayer and the first interlayer dielectric layer causes the removal of aportion of an upper portion of the hardmask of the at least one gatestructure adjacent to the second opening and a portion of an upperportion of the spacers on the sidewalls of the hardmask to form a secondrecess.

In one embodiment, selectively etching the second interlayer dielectriclayer and the first interlayer dielectric layer causes a portion of theupper surface of the hardmask of the at least one gate structure awayfrom the second opening to be higher than a remaining surface portion ofthe hardmask in a vicinity of the second opening, and a portion of theupper surface of the hardmask of the at least one gate structure in thevicinity of the second opening to be lower than a bottom in the middleportion of the first recess of the hardmask.

In one embodiment, after processing the hardmask material layer, themask member is configured such that a ratio of a thickness of a portionof the bottom of the first recess in the mask member to a thickness of aportion of the second dielectric layer at a same level of the bottom ofthe mask member is greater than an etch selectivity ratio of a materialof the mask member to a material of the second dielectric layer.

In one embodiment, the at least one gate structure includes two adjacentgate structures, and the second opening is disposed between the twoadjacent gate structures and exposing spacers of the two adjacent gatestructures adjacent to the second opening, and a surface of the activeregion disposed between the two adjacent gate structures.

In one embodiment, processing the hardmask material layer includesperforming an over polish on the hardmask material layer using achemical mechanical polishing process.

In one embodiment, processing the hardmask material layer includesperforming a chemical mechanical polishing process on the hardmaskmaterial layer to form the hardmask on the metal gate; and etching backthe upper surface of the hardmask to form the first recess.

In one embodiment, selectively etching the second interlayer dielectriclayer and the first interlayer dielectric layer comprises performing adry plasma etching based on a fluorocarbon gas (CxFy, where x and y arepositive numbers), wherein the etch ratio of the third and seconddielectric layers to the hardmask and/or the first dielectric layer isgreater than 1 and less than or equal to 10.

In one embodiment, the method further includes forming a contact memberextending to the exposed surface portion of the active region.

In one embodiment, the spacers and the hardmask are made of a samematerial.

In one embodiment, the active region is a fin-shaped active region.

Some embodiments of the present invention also provide a semiconductordevice. The semiconductor device may include a substrate structurecomprising an active region, a first interlayer dielectric layer on theactive region, and a first opening in the first interlayer dielectriclayer and extending to the active region; at least one gate structure inthe first opening and comprising spacers on sidewalls of the firstopening, a gate dielectric layer on the active region, a metal gate onthe gate dielectric layer, and a hardmask on the metal gate and having afirst recess in a middle portion of its upper surface, the gatedielectric layer, the metal gate, and the hardmask being between thespacers; and a second opening adjacent to the at least one gatestructure in the first opening and exposing the spacers and a surface ofthe active region.

In one embodiment, the semiconductor device also includes a secondrecess formed on a portion of an upper portion of the mask memberadjacent to the second opening and a portion of an upper portion of thespacers on the sidewalls of the mask member adjacent to the opening.

In one embodiment, a portion of an upper surface of the mask member awayfrom the first opening is higher than a remaining portion of the uppersurface of the mask member, and a portion of an upper surface of themask member in a vicinity of the first opening is lower than a bottom inthe middle portion of the first recess.

In one embodiment, the mask member is configured such that a ratio of athickness of a portion at the bottom of the first recess in the maskmember to a thickness of a portion of the second dielectric layer at asame level of the bottom of the mask member is greater than an etchselectivity ratio of a material of the mask member to a material of thesecond dielectric layer.

In one embodiment, the first opening includes two adjacent openings, theat least one gate structure includes two adjacent gate structures eachdisposed in one of the two adjacent openings, and the second openingexposes spacers between the two adjacent gate structures and a surfaceof the active region disposed between the two adjacent gate structures.

In one embodiment, the semiconductor device may further include acontact member filling the first and second openings and extending tothe exposed surface of the active region.

In one embodiment, the spacers and the hardmask include a same material.In one embodiment, the active region is a fin-shaped active region.

The following detailed description together with the accompanyingdrawings will provide a better understanding of the nature andadvantages of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are described with reference to theaccompanying drawings. In the drawings, like reference numbers mayindicate identical or functionally similar elements.

FIG. 1A is a cross-sectional view illustrating of a to-be-etched contacthole of a flash memory device.

FIG. 1B is a cross-sectional view illustrating an etched contact hole ofa flash memory device in an ideal case.

FIGS. 1C and 1D are cross-sectional views exemplarily illustratingproblems in a conventional self-aligned contact (SAC) process(particular in an SAC process for flash memory devices).

FIG. 2 is a simplified flowchart illustrating some of the main steps ina method for manufacturing a semiconductor device according to oneembodiment of the present invention.

FIGS. 3 through 11 are cross-sectional views illustrating intermediatestages of a semiconductor device in some of the main steps in amanufacturing method according to one embodiment of the presentinvention.

FIG. 12 is a cross-sectional view illustrating a semiconductor deviceaccording to another embodiment of the present invention.

FIG. 13 is a simplified flowchart illustrating some of the main steps ina method for manufacturing a semiconductor device according to oneembodiment of the present invention.

FIGS. 14 through 23 are cross-sectional views illustrating intermediatestages of a semiconductor device in some of the main steps in amanufacturing method according to one embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention now will be described more fullyhereinafter with reference to the accompanying drawings. The inventionmay, however, be embodied in many different forms and should not beconstrued as limited to the embodiments set forth herein. Rather, theseembodiments are provided so that this disclosure will be thorough andcomplete, and will fully convey the scope of the invention to thoseskilled in the art. The features may not be drawn to scale, some detailsmay be exaggerated relative to other elements for clarity. Like numbersrefer to like elements throughout.

It will be understood that when an element such as a layer, region orsubstrate is referred to as being “on” or extending “onto” anotherelement, it can be directly on or extend directly onto the other elementor intervening elements may also be present. In contrast, when anelement is referred to as being “directly on” or extending “directlyonto” another element, there are no intervening elements present. Itwill also be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present.

Relative terms such as “below” or “above” or “upper” or “lower” or“horizontal” or “lateral” or “vertical” may be used herein to describe arelationship of one element, layer or region to another element, layeror region as illustrated in the figures. It will be understood thatthese terms are intended to encompass different orientations of thedevice in addition to the orientation depicted in the figures.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an”, and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”,“comprising”, “includes”, and/or “including” when used herein, specifythe presence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

Embodiments of the invention are described herein with reference tocross-sectional illustrations that are schematic illustrations ofidealized embodiments (and intermediate structures) of the invention.The thickness of layers and regions in the drawings may be enlargedrelative to other layers and regions for clarity. Additionally,variations from the shapes of the illustrations as a result, forexample, of manufacturing techniques and/or tolerances, are to beexpected. Thus, embodiments of the invention should not be construed aslimited to the particular shapes of regions illustrated herein but areto include deviations in shapes that result, for example, frommanufacturing. For example, an implanted region illustrated as arectangle will, typically, have rounded or curved features and/or agradient of implant concentration at its edges rather than a discretechange from implanted to non-implanted region. Likewise, a buried regionformed by implantation may result in some implantation in the regionbetween the buried region and the surface through which the implantationtakes place. Thus, the regions illustrated in the figures are schematicin nature and their shapes are not intended to illustrate the actualshape of a region of a device and are not intended to limit the scope ofthe invention.

The embodiments described and references in the disclosure to “oneembodiment,” “an embodiment,” “an exemplary embodiment” indicate thatthe embodiments described may include a particular feature, structure,or characteristic. However, every embodiment may not necessary includethe particular feature, structure or characteristic. As used throughoutthis disclosure, the terms “depositing” and “forming” are usedinterchangeably.

Embodiments of the present invention now will be described more fullyhereinafter with reference to the accompanying drawings, in whichembodiments of the invention are shown. This invention may, however, beembodied in many different forms and should not be construed as limitedto the embodiments set forth herein.

FIG. 2 is a simplified flowchart of a method for manufacturing asemiconductor device according to one embodiment of the presentinvention. FIGS. 3 through 11 are cross-sectional views illustratingintermediate stages of a semiconductor device in some of the main stepsin a manufacturing method according to one embodiment of the presentinvention.

Referring to FIG. 2, the method may include the following process steps:

At 1201: providing a substrate structure. The substrate structure mayinclude a semiconductor substrate having an active region, a pluralityof gate structures on the active region and separated from each other.The gate structures each may include a gate dielectric layer on theactive region and a gate on the gate dielectric layer. The gatestructures each may also include a hardmask layer on the gate.

FIG. 3 and FIG. 4A are cross-sectional views of an exemplary substratestructure. Referring to FIG. 3, a gate dielectric layer 201 is formed ona semiconductor substrate 200 having an active region. A charge storagelayer 203 is formed on gate dielectric layer 201. An intermediatedielectric layer 205 is formed on charge storage layer 203. A first gatelayer 207 is formed on intermediate dielectric layer 205. A hardmasklayer 209 is formed on first gate layer 207.

Herein, it is understood by those of skill in the art that these layersmay be formed using processes known in the art or developed in thefuture, and the processes of forming these layers will not be describedin detail for sake of brevity. Further, it is understood thatsemiconductor substrate 200 is not limited to a particular type of asemiconductor layer as long as the semiconductor layer includes anactive region. For example, the semiconductor substrate may be a bulksemiconductor substrate, an SOI (semiconductor on insulator) substrate,or the like. In other words, reference numeral 200 may also be used toindicate an active region including a semiconductor substrate.

Next, an etching process is performed on the layers to form gatestructures 401 and 403, as shown in FIG. 4A. Thus, a semiconductorstructure is provided that includes a semiconductor substrate 200 havingan active region and gate structures 401 and 403 on the active region.Each of gate structures 401 and 403 includes a gate dielectric layer 201on the active region and a gate portion on gate dielectric layer 201.The gate portion includes a charge storage portion 203 on gatedielectric layer 201, an intermediate dielectric layer 205 on chargestorage portion 203, and a first gate layer 207 on intermediatedielectric layer 205. The gate structures each may also include ahardmask 209 on the gate portion (specifically on first gate layer 207).

In some embodiments, charge storage portion 203 may be a floating gate,for example, it may be formed of polysilicon. In other embodiments,charge storage portion 203 may be made of other material as long as itis capable of storing electrical charge. For example, charge storageportion 203 may be a stack of silicon oxide/silicon nitride/siliconoxide (ONO).

In some embodiments, intermediate dielectric layer 205 may be formed ofany suitable dielectric layer, e.g., silicon oxide, silicon nitride, ora stack of silicon oxide and silicon nitride. For example, in the casewhere charge storage portion 203 is a floating gate, intermediatedielectric layer 205 may be formed of a stack of silicon oxide/siliconnitride/silicon oxide (ONO).

In some embodiments, first gate layer 207 may be made of dopedpolysilicon. In other embodiments, first gate layer 207 may also be madeof a metal or other conductive materials

In some embodiments, hardmask 209 may be made of one or more of siliconoxide, silicon nitride, and metal oxide.

Further, as those of skill in the art will appreciate, the semiconductordevice according to the present invention may include a flash memorycell including one of the gate structures.

Similarly, FIG. 4B is a cross-sectional view of a substrate structureaccording to another embodiment of the present invention. The substratestructure in FIG. 4B may include a semiconductor substrate 200 having anactive region, and gate structures 401′ and 403′ on the active region.Each of gate structures 401′ and 403′ includes a gate dielectric layer201 on the active region and a gate portion including a gate layer 207on gate dielectric layer 201. Each of gate structures 401′ and 403′ alsoincludes a hardmask 209 on the gate portion (specifically on second gatelayer 207). Similarly, the gate structures may be formed by forming agate dielectric layer on the semiconductor substrate, forming a gatelayer on the gate dielectric layer, forming a hardmask layer on thesecond gate layer, and etching the hardmask layer, the second gatelayer, the gate dielectric layer to form the gate structures. Thefollowing process steps will be described based on FIG. 4A withreference to FIGS. 5 through 11. However, the description may also beapplied to the substrate structure in FIG. 4B.

It is understood that the number of gate structures can be any integernumber N. In the example shown in the drawings, two adjacent andseparate gate structures 401 and 403 are used on the semiconductorsubstrate. But it is understood that the number is arbitrary chosen fordescribing the example embodiment and should not be limiting.

At 1203: a first dielectric layer is formed on the substrate structure.Referring to FIG. 5, a first dielectric layer 501 is formed on thesubstrate structure covering the gate structures and the surface portionof the active area adjacent to the gate structures. In some embodiments,first dielectric layer 501 may include a same material as that ofhardmask 209, such as silicon nitride. In other embodiments, firstdielectric layer 501 may include a material that is different from thatof hardmask 209 as long as it has an etch selectivity higher than theetch selectivity of a second dielectric layer 601 that is formed laterthereon (see FIG. 6). In other words, the etch rate of the etchant usedfor the first insulating layer is greater than that of the etchant usedfor the second insulating layer. In a preferred embodiment, firstdielectric layer 501 may be formed of silicon nitride using a flowablechemical vapor deposition (FCVD).

It will be appreciated that, in the case of two adjacent and separategate structures 401 and 403, first dielectric layer 501 may be formed tocover gate structures 401 and 403 and the surface portion of the activeregion between the adjacent separate gate structures 401 and 403.

Herein, hardmask 209 on the gate portions and first dielectric layer 501on hardmask 209 may be collectively referred to as a mask member 603, asshown in FIG. 6.

At 1205: a second dielectric layer is formed on the first dielectriclayer. Referring to FIG. 6, a second dielectric layer 601 is formed onfirst dielectric layer 501 covering the gate structures. In other words,second dielectric layer 601 has a thickness that is greater than theheight of the gate structures. Second dielectric layer 601 may includesilicon oxide. For the sake of clarity, reference numerals that havebeen provided to elements in previous drawings will be omitted andfurther description will not be repeated hereinafter. In someembodiments, second dielectric layer 601 may fill the air gap betweenadjacent gate structures 401 and 403.

As described above, hardmask 209 and first dielectric layer 501 disposedthereon are collectively referred to as mask member 603, which is filledwith the same pattern as hardmask 209 in FIGS. 6 through 12.

At 1207: a recess treatment (alternatively referred to as surfacetreatment) is performed on the second dielectric layer. The recesstreatment (i.e., surface treatment) is used to remove an upper portionof the second dielectric layer or an upper portion of the seconddielectric layer and an upper portion of the mask portion. Thus, afterthe recess treatment (surface treatment), the upper surface of theremaining second dielectric layer is flush with the upper surface of theremaining mask portion, and the middle portion of the upper surface ofthe remaining mask portion has a first recess. As used herein, the term“flush” means substantially planar within variations in manufacturingtolerances.

In one embodiment, the surface treatment may include 12071: afterforming second dielectric layer 601, performing a planarization ofsecond dielectric layer 601 to expose the upper surface of mask member603 (e.g., an upper surface of first dielectric layer 501 or an uppersurface of hardmask layer 209 of the gate structures), as shown in FIG.7. It is understood, as described above, the etch selectivity of firstdielectric layer 501 and hardmask 209 may be considered as a commonconstituent element (as indicated by reference numeral 603) relative tothe etch selectivity of second dielectric layer 601. Thus, by way ofexample, the formed first recess may be configured, such that, forexample, only in first dielectric layer 501, only in hardmask 209 (inwhich case first dielectric layer 501 is removed), or in firstdielectric layer 501 and extending onto hardmask 209. In someembodiments, first dielectric layer 501 and hardmask 209 may be formedof the same material, as described above, so that first dielectric layer501 and hardmask 209 may be considered together as a common element.

In other words, the planarization causes the upper surface of theplanarized mask portion to be exposed, and the planarization may or maynot cause an upper portion of the mask portion to be removed.

The surface treatment may also include 12073: the exposed upper portionof the mask portion is etched back to form a first recess 801 in theupper surface of the mask member whose middle portion is depressed, asshown in FIG. 8. In an exemplary embodiment, the first dielectric layermay be formed using a plasma etching process including afluorine-containing process gas, including, but is not limited to, oneor more of CHF₃, CH₂F₂, CH₃F, then performing a surface treatment on theupper surface of the first dielectric layer or on an upper surface ofthe hardmask of the gate structures to form the first recess.

In another embodiment, the surface treatment may include 12075: afterforming second dielectric layer 601 on the first dielectric layer,performing an over polish using a chemical mechanical polishing processon second dielectric layer 601, so that after the surface treatment, theupper surface of the remaining second dielectric layer 601 is flush withthe upper surface of the remaining mask member 603, and the middleportion of the upper surface of the mask member has a first recess.

In other words, in the mask member, the portion of its upper surfaceadjacent to the to-be-formed opening (1003 in FIG. 10) has a thicknessthat is greater than the thickness of the middle portion. Further, it isunderstood that the first recess shown in FIG. 8 is merely exemplary,and the scope of the invention is not limited to example embodimentsshown in the figures.

At 1209: a third dielectric layer is formed covering an upper surface ofthe remaining second dielectric layer and an upper surface of theremaining mask member. Referring to FIG. 9, a third dielectric layer 901is formed covering an upper surface of the remaining second dielectriclayer and an upper surface of the remaining mask member. The materialand the process for forming third dielectric layer 901 are notparticularly limited. For example, in some embodiments, third dielectriclayer 901 may be formed of a spin-coated dielectric layer using a spincoating process. In other embodiments, third dielectric layer 901 may beformed of silicon oxide using a conventional chemical vapor deposition(CVD) process.

At 1211: third dielectric layer 901 and second dielectric layer 601 areselectively etched relative to first dielectric layer 501, preferably,to the first dielectric layer and the remaining hardmask portion(corresponding to the first dielectric layer and selectively theremaining hardmask member) to form an opening adjacent to the gatestructures, as shown in FIG. 10. The opening exposes the firstdielectric layer on sidewalls of the adjacent gate structures on theactive region.

In the embodiment including two adjacent gate structures, the openingmay include an opening 1003 between and adjacent to the two gatestructures. Opening 1003 exposes a portion of first dielectric layer 501on sidewalls between the two gate structures and a portion of firstdielectric layer 501 on the active region between the two gatestructures.

In some embodiments, an etching process may be performed using apatterned mask (e.g., photoresist) 1001. For example, a functional layerfor lithography such as, but not limited to, a bottom anti-reflectivecoating (BARC), amorphous carbon (AC), and/or dielectric anti-reflectivecoating (DARC). Thereafter, a photoresist is formed on the functionallayer and patterned (exposed and developed). For example, patterned mask1001 may be formed using a dry or wet scanning, nanoprinting, orself-assembly process. In some embodiments, the feature size (e.g.,lateral dimension) in the patterned mask to form the opening (e.g.,opening in the patterned mask) is greater than a feature size of thecorresponding opening. After etching the third and second dielectriclayers, the photoresist and the functional layer can be removed.

Herein, a dry plasma etching based on a fluorocarbon gas (CxFy, where xand y are positive numbers) may be used and is configured such, that theetch ratio of the third and second dielectric layers to the hardmaskand/or the first dielectric layer is greater than 1, preferably greaterthan 1 and less than or equal to 10, more preferably between 3 and 10,and more preferably between 5 and 10.

In some embodiments, referring to FIG. 10, the etching process may causethe portion of the upper surface of mask member 603 away from theopening to be higher than the remaining portion, and the portion of theupper surface of the member portion 603 in the vicinity of the openingto be lower than the bottom of the first recess in the middle portion ofthe mask member.

In some embodiments, the etching process may also cause the removal ofan upper portion of the remaining mask portion 603 adjacent to theopening and a portion of first dielectric layer 501 on the sidewalls ofthe remaining mask portion 603, thereby forming a second recess 1005, asshown in FIG. 10. In other words, a second recess is formed on an upperportion of the mask member adjacent to the opening and a portion of thefirst dielectric layer on sidewalls of the mask member adjacent to theopening.

In one embodiment, after the surface treatment, the ratio of thethickness of the portion at the bottom of the first recess in the maskmember to the thickness of the second dielectric layer at the same levelof the bottom of the first recess in the mask member is greater than theetch selectivity ratio of the material of the mask member to thematerial of the second dielectric layer. It should be understood bythose skilled in the art that the above configuration is not essentialto the described embodiments of the present invention, other embodimentsmay not require such configuration depending on the material employed,the size of the opening, the thickness of each material layer.

Next, referring to FIG. 11, a portion of the exposed first dielectriclayer 501 on the active region is removed to expose a surface of theactive region. A contact 1101 is then formed on the exposed surface ofthe active region. In one embodiment, the portion of the firstdielectric layer on the active region may be removed using aconventional spacer forming process. In some embodiments, a dry plasmaetching based on a fluorocarbon gas (CxFy, where x and y are positivenumbers) may be used and is configured such, that the etch ratio of thethird and second dielectric layers to the hardmask and/or the firstdielectric layer is greater than 1, preferably greater than 1 and lessthan or equal to 10, more preferably between 3 and 10, and morepreferably between 5 and 10. Contact 1101 may be formed using anymaterials and processes known in the art or developed in the future, sothat a detail description thereof will be omitted.

In some embodiments, the active region may be in the form of a bulksemiconductor, e.g., the active region may be formed from a bulksemiconductor substrate or a silicon-on-insulator (SOI) substrate. Inother embodiments, the active region may be a fin-shaped active region.For example, FIGS. 4A to 11 may be cross-sectional views taken along thelongitudinal direction of the semiconductor fin.

According to embodiments of the present invention, after forming acontact hole to the active region, hardmask 209 and first dielectriclayer 501 remain almost unchanged in shape (or has at least a betterprofile shape) to cover first gate 207.

According to embodiments of the present invention, it is possible toreduce or even eliminate the problems of the prior art, by preventingdamage caused to the gate structures, and short circuits from beingformed between the contact and the active region. The profile of thedevice structure is also improved, thereby improving reliability andyield of the device.

It is to be understood that the figures of the exemplary embodimentsshow two adjacent and separated gate structures and the first dielectriclayer formed on the two gate structures and on the surface of the activearea between the two gate structures. Accordingly, the second dielectriclayer is formed filling an air gap between the two gate structures.Accordingly, the opening is disposed between the two gate structures andadjacent to the two gate structures and exposes a portion of the firstdielectric layer between the two gate structures and a portion of thefirst dielectric layer on the active region between the two gatestructures. But the invention is not limited thereto, and may includefewer than two or more than two gate structures. In such cases, similareffects and results can be also achieved.

FIG. 12 is a cross-sectional view of a semiconductor device according toanother embodiment of the present invention. The semiconductor device inFIG. 12 is substantially the same as that in FIG. 11 with the differencethat a gate structure 403 of the flash memory device on the right sidein FIG. 11 is replaced by a gate structure 1203 for a normal MOStransistor (e.g., a logic device). Gate structure 1203 includes a gatedielectric layer 201 on active region 200, a gate 207 on gate dielectriclayer 201, and a hardmask 209 on gate 207. It is to be understood thatgate dielectric layer 201, gate 207 and hardmask 209 may be formed thesame way and concurrently with the respective gate dielectric layer, thegate layer and the hardmask as shown in FIGS. 4 through 11. Likewise,first dielectric layer 501 is formed on gate structure 1203. As iseasily discernible in FIG. 12, gate structure 1203 of the logic deviceis thinner than gate structure 401 of the memory device (flash memorydevice), therefore, the risk of the gate being connected (shortcircuited) to contact 1201 in the corresponding opening on the logicdevice side is smaller that that in the flash memory device side, sothat it is not necessary to give special consideration to the contact onthe logic device side. On the flash memory side, it is possible toreduce the risk of the gate being short-circuited to the contact and therisk of the contact being disconnected (i.e., open circuit) from theactive region according to embodiments of the present invention. Thisalso applies to cases where there is no gate structure on the right sideof the opening.

It will be appreciated that embodiments of the present invention alsoprovide a semiconductor device including a substrate structure. Thesubstrate structure includes a semiconductor substrate having an activeregion and at least one gate structure on the active region. The gatestructure includes a gate dielectric layer on the active layer and agate on the gate dielectric layer. The gate structure further includes amask member on the gate. The gate structure also includes a firstdielectric layer on sidewalls of the gate structure. The semiconductordevice also includes an opening adjacent to the gate structure exposinga surface of the first dielectric layer on the sidewalls of the gate anda portion of the active region adjacent to the gate structure. The maskmember has an upper surface including a first recess formed in themiddle portion of the upper surface of the mask member.

In one embodiment, the semiconductor device also includes a secondrecess formed on an upper portion of a portion of the mask memberadjacent to the corresponding opening and a portion of the firstdielectric layer on a sidewall of the corresponding mask member adjacentto the corresponding opening.

In one embodiment, for each gate structure, the portion of the uppersurface of the mask member away from the opening is higher than theremaining portion of the upper surface of the mask member, the portionof the upper surface of the mask member in the vicinity of the openingis lower than the bottom of the first recess in the mask member.

In one embodiment, the at least one gate structure includes two adjacentgate structures. The opening is disposed between and adjacent to the twogate structures. The opening exposes a portion of the first dielectriclayer between the two gate structures and a surface of the active regionbetween the two gate structures.

In one embodiment, the mask member is configured such that a ratio ofthe thickness of the portion at the bottom of the first recess of themask member to the thickness of the portion of the second dielectriclayer at the same level of the bottom of the first recess in the maskmember is greater than the etch selectivity ratio of the material of themask member to the second dielectric layer in the etch process.

In one embodiment, the semiconductor device further includes a contactmember filling the exposed surface of the active region in the opening.

In one embodiment, the charge storage portion is a floating gate or astacked structure of silicon oxide-silicon nitride-silicon oxide. In oneembodiment, the intermediate dielectric layer is a stacked structure ofsilicon oxide-silicon nitride-silicon oxide.

In one embodiment, the semiconductor device includes a flash memory cellthat includes the at least one gate structure.

In one embodiment, the hardmask layer is formed of one or more elementsselected from the group consisting of silicon oxide, silicon nitride,and metal oxide.

In one embodiment, the active region is a fin-shaped active region.

In one embodiment, the gate portion includes a charge storage portion onthe gate dielectric layer, an intermediate dielectric layer on thecharge storage portion, and a first gate layer on the intermediatedielectric layer. In one embodiment, charge storage portion is afloating gate or a stacked structure of silicon oxide-siliconnitride-silicon oxide.

In one embodiment, the gate portion includes a gate layer on the gatedielectric layer.

Similarly, according to embodiments of the present invention, theproblems associated with the prior art can be mitigated or eliminated,damage to the gate structure(s) can be avoided, undesired short-circuitsof the contacts and the gate structures can be prevented, andreliability and yield of the semiconductor device are improved. Thedevice profile is improved during the fabrication process and opencircuit of the contact with the active area can be avoided.

An embodiment of the present invention will now be described in detailwith reference to FIGS. 13 through 23.

FIG. 13 is a simplified flowchart illustrating some of the main steps ina method for manufacturing a semiconductor device according to anotherembodiment of the present invention. FIGS. 14 through 23 arecross-sectional views illustrating intermediate stages of asemiconductor device in some of the main steps in a manufacturing methodaccording to one embodiment of the present invention.

Referring to FIG. 13, at 1301, a substrate structure is provided. Thesubstrate structure may include an active region, a first interlayerdielectric layer on the active region, and at least one first opening inthe first interlayer dielectric layer and extending into the activeregion. The substrate structure may also include spacers on sidewalls ofthe first opening and a gate dielectric layer in the first opening andon the active region.

Referring to FIG. 14, the substrate structure may include an activeregion 200, a first interlayer dielectric layer 601 on active region200, at least one first opening 1401/1403 in first interlayer dielectriclayer 601 extending to active region 200. The substrate structure mayfurther include spacers 501 on sidewalls of at least one first opening1401/1403 and a gate dielectric layer 201 in the first opening and onthe active region. In some embodiments, at least one first opening1401/1403 includes two adjacent and separate openings 1401 and 1403.

It is understood by those of skill in the art that these layers may beformed using processes known in the art or developed in the future, anddetails of processes of forming such layers will not be describedherein. Further, it is understood that substrate structure 200 is notparticularly limited, as long it includes a semiconductor layer that hasan active region. For example, the semiconductor layer may be a bulksilicon substrate, a semiconductor on insulator (SOI), and the like. Inother words, reference numeral 200 may also be used to indicate asemiconductor substrate. In some embodiments, the active region may bein the form of a fin.

Next, at 1303, as shown in FIG. 15, a metal gate material layer 1501 isformed on the substrate structure filling at least one first opening1401/1403. In some embodiments, metal gate material layer 1501 may beformed using a sputtering or deposition (e.g., chemical vapordeposition) process. The metal gate material layer may be formed of ametal such as tungsten. The metal gate material layer may also includeother functional layers, e.g., an adhesion layer, a barrier layer,and/or a work function adjustment layer, etc.

Next, at 1305, as shown in FIG. 16, metal gate material layer 1501 isetched back to form a metal gate 203 in at least one first opening1401/1403 and on gate dielectric layer 201.

Next, at 1307, as shown in FIG. 17, after forming the metal gate, ahardmask material layer 1701 is formed filling the at least one firstopening. In one example embodiment, the hardmask material layer may beformed of silicon nitride. In some embodiments, the spacers may have thesame material as that of the hardmask layer.

Thereafter, at 1309, hardmask material layer 1701 is submitted to aprocess to form a hardmask 701 on the metal gate. Hardmask 701 is formedhaving a first recess 801 in the middle portion of its upper surface.Thus, a gate structure is formed in the first opening, the gatestructure includes gate dielectric layer 201, metal gate 203, hardmask701, and spacers 501 on sidewalls of the first opening.

In one embodiment, the method may include, as shown in FIG. 18, afterforming hardmask material layer 1701, a planarization process to exposethe upper surface of first interlayer dielectric layer 601. Theplanarization causes the upper surface of first interlayer dielectriclayer 601 to be flush with the upper surface of the remaining portion ofthe hardmask material layer (hardmask 701). Next, the upper surface ofhardmask 701 is etched back to form a first recess 801 which is in themiddle portion of the upper surface of the hardmask 701. In oneexemplary embodiment, the hardmask may be processed by plasma etchingusing a fluorine-containing process gas, including but not limited to,one or more of CHF₃, CH₂F₂, CH₃F to form the first recess.

In another embodiment, the method may include, after forming hardmaskmaterial layer 1701, performing an over polish on the hardmask layerusing a chemical mechanical polishing (CMP) process so that, after therecess (surface) treatment, the upper surface of the remaining portionof the hardmask material layer (hardmask 701) is flush with the uppersurface of interlayer dielectric layer 601 and has first recess 801 inthe middle portion of the upper surface of hardmask 701, as shown inFIG. 19.

It is to be understood that the first recess shown in FIG. 19 is merelyexemplary and that embodiments of the present invention are not limitedto the example shown in the figures.

Next, at 1311, as shown in FIG. 20, a second interlayer dielectric layer2001 is formed on the substrate structure that includes the formedhardmask. In some embodiments, second interlayer dielectric layer 2001may be formed of a spin-coated dielectric layer using a spin coatingprocess. In other embodiments, second interlayer dielectric layer 2001may be formed of a silicon oxide using a conventional chemical vapordeposition (CVD) process.

Next, at 1313, as shown in FIG. 21, a selective etching process isperformed on second interlayer dielectric layer 2001 and firstinterlayer dielectric layer 601, at least on spacers 501, and preferablyon spacers 501 and hardmask 701 to form a second opening 2101 adjacentto the at least one gate structure. Second opening 2101 exposes spacers501 of the adjacent gate structures and a surface of the active regionbetween the adjacent gate structures.

In embodiments where the at least one first opening includes twoadjacent first openings (thus including two adjacent corresponding gatestructures), the formed second opening is second opening 2101 betweenand adjacent to the two gate structures formed in corresponding twofirst openings 1401 and 1403. Second opening 2101 exposes spacers 501 ofthe two gate structures adjacent to the second opening, and secondopening 2101 exposes the surface of the active region between thespacers of the two gate structures adjacent to the second opening.

In some embodiments, the etching process may be performed using apatterned mask (e.g., photoresist) 2103. For example, a functional layerfor lithography, such as but not limited to, a bottom anti-reflectivecoating (BARC), amorphous carbon (AC), and/or dielectric anti-reflectivecoating (DARC) may be formed on the structure shown in FIG. 20, followedby formation of a photoresist on the functional layer and patterning(e.g., exposure and development). The present invention is not limitedthereto. For example, patterned mask 2103 may be formed by a dry or wetscanning, nano-printing, or self-assembly process. In some embodiments,the feature size (e.g., the lateral dimension) used to form therespective openings in the patterned mask (e.g., openings in thepatterned mask) is greater than a corresponding size of thecorresponding second opening 2101. After etching second interlayer layer2001 and first interlayer layer 601, the patterned mask and thefunctional layer can be removed.

Herein, a dry plasma etching based on a fluorocarbon gas (CxFy, where xand y are positive numbers) may be used and is configured such, that theetch ratio of the second and first interlayer dielectric layers to thehardmask and/or the spacers (i.e., the ratio of the etch rate of thesecond and first interlayer dielectric layers to the etch rate of thehardmask and/or spacers) is greater than 1, preferably greater than 1,preferably greater than 1 and less than or equal to 10, more preferablybetween 3 and 10, and more preferably between 5 and 10.

The etching process also causes a removal of a portion of the hardmaskof the gate structures and a portion of the upper portion of the spacerson the sidewalls of the hardmask adjacent the second opening to form asecond recess 2105.

In some embodiments, referring to FIG. 21, the etching process causesthe portion of the upper surface of hardmask 701 which is farther awayfrom the second opening to be higher than the remaining portion of theupper surface of hardmask 701, and the portion of the upper surface ofhardmask 701 in the vicinity of the second opening is lower than thebottom of the first recess in the hardmask.

Herein, preferably, after the etching process, the ratio of thethickness of the portion at the bottom of the first recess in thehardmask to the thickness of the first interlayer dielectric layer atthe same level as the bottom of the first recess in the hardmask isgreater than the etch selectivity ratio of the material of the hardmaskto the material of the first interlayer dielectric layer in the etchingprocess. One of skill in the art will appreciate that the aboveconfiguration is not essential to the present invention and thatdifferent embodiments may not require such an arrangement depending onthe materials employed, the size of the mask opening, the thickness ofeach material layer.

In accordance with the present invention, hardmask 701 and spacers 501remain in a relatively good profile shape to cover first gate 207.

Next, referring to FIG. 22, a contact 2301 may be formed on the exposedsurface of the active region. Contact 2301 may be formed using materialsand processes known in the art or developed in the future, so that theformation of the contact will not be described in detail herein.

In some embodiments, the active region may be a fin-shaped activeregion. In this case, FIGS. 14 to 23 are cross-sectional viewsillustrating the intermediate stages of the semiconductor device alongthe longitudinal direction of the fin.

According to embodiments of the present invention, at least the priorart problems can be mitigated or eliminated, damage to the gatestructure can be prevented, undesired short-circuit between the contactand the gate structure can be avoided, thereby improving the profile ofthe device and/or preventing open circuit of the contact with the activeregion, and improving the device yield and reliability.

Embodiments of the present invention also provide a semiconductor devicecomprising a substrate structure. The substrate structure includes anactive region and a first interlayer dielectric layer on the activeregion, a first opening in the first interlayer dielectric layer andextending to the active region.

The semiconductor device also includes a gate structure in the firstopening. The gate structure includes spacers on opposite sidewalls ofthe first opening. The gate structure also includes a gate dielectriclayer on the active region, a metal gate on the gate dielectric layer,and a hardmask on the metal gate, all of which are disposed between thespacers. The hardmask has a first recess in the middle portion of itsupper surface.

The semiconductor device also includes a second opening adjacent to thegate structure in the first opening, the second opening exposes spacersof the first opening and a surface of the active region adjacent to thegate structure.

In one embodiment, a second recess is formed on a portion of thehardmask of the gate structure adjacent to the second opening and aportion of the spacers on the sidewalls of the hardmask adjacent to thefirst opening.

In one embodiment, the portion of the upper surface of the hardmask awayfrom the openings (first and second openings) is higher than theremaining portion of the upper surface of the hardmask, and the portionof the upper surface of the hardmask in the vicinity of the openings islower than the bottom of the first recess of the hardmask.

In one embodiment, the first opening includes two adjacent openings eachhaving a gate structure formed therein. The second opening is disposedbetween the two openings and adjacent to the two gate structures. Thesecond opening exposes the spacers adjacent to the two gate structuresand a surface of the active region between the spacers that are adjacentto the two gate structures.

In one embodiment, the hardmask is configured such that the ratio of thethickness of the portion at the bottom of the first recess in thehardmask to the thickness of the first interlayer dielectric layer atthe same level of the bottom of the first recess in the hardmask isgreater than the etch selectivity ratio of the material of the hardmaskto the material of the first interlayer dielectric layer.

In one embodiment, the semiconductor device further includes a contactmember filling the second opening and in physical contact with theexposed surface of the active region.

In one embodiment, the hardmask is formed of one or more elementsselected from the group consisting of silicon oxide, silicon nitride,and metal oxide. In one embodiment, the spacers include a same materialas that of the hardmask.

In one embodiment, the active region is a fin-shaped active region.

Similarly, according to embodiments of the present invention, theproblems associated with the prior art can be mitigated or eliminated,damage to the gate structure can be avoided, undesired short-circuits ofthe contact and the gate structures can be prevented, and reliabilityand yield of the semiconductor device are improved. The device profileis improved during the fabrication process and open circuit of thecontact with the active area can be avoided.

References in the specification to “one embodiment”, “an embodiment”,“an example embodiment”, “some embodiments”, etc., indicate that theembodiment described may include a particular feature, structure, orcharacteristic, but every embodiment may not necessarily include theparticular feature, structure, or characteristic. Moreover, such phrasesare not necessarily referring to the same embodiment. Further, when aparticular feature, structure, or characteristic is described inconnection with an embodiment, it is submitted that it is within theknowledge of one skilled in the art to affect such feature, structure,or characteristic in connection with other embodiments whether or notexplicitly described.

While the present invention is described herein with reference toillustrative embodiments, this description is not intended to beconstrued in a limiting sense. Rather, the purpose of the illustrativeembodiments is to make the spirit of the present invention be betterunderstood by those skilled in the art. In order not to obscure thescope of the invention, many details of well-known processes andmanufacturing techniques are omitted. Various modifications of theillustrative embodiments as well as other embodiments will be apparentto those of skill in the art upon reference to the description. It istherefore intended that the appended claims encompass any suchmodifications.

Furthermore, some of the features of the preferred embodiments of thepresent invention could be used to advantage without the correspondinguse of other features. As such, the foregoing description should beconsidered as merely illustrative of the principles of the invention,and not in limitation thereof.

What is claimed is:
 1. A method for manufacturing a semiconductordevice, comprising: providing a substrate structure including an activeregion and a first interlayer dielectric layer on the active region, thefirst interlayer dielectric layer including at least one openingextending to the active region, the substrate structure furtherincluding spacers on sidewalls of the at least one opening and a gatedielectric layer in the at least one opening and on the active region;forming a metal gate material layer on the substrate structure to fillthe at least one opening; etching back the metal gate material layer toform a metal gate in the at least one opening and on the gate dielectriclayer; after forming the metal gate, forming a hardmask material layerto fill the at least one opening; processing the hardmask material layerto form a hardmask on the metal gate, the hardmask having an uppersurface including a first recess in a middle portion of the hardmask, sothat at least one gate structure including the gate dielectric layer,the metal gate, the hardmask and the spacers is formed in the at leastone opening; forming a second interlayer dielectric layer on thesubstrate structure including the hardmask; and selectively etching thesecond interlayer dielectric layer and the first interlayer dielectriclayer with respect to the spacers and the hardmask to form a secondopening adjacent to the at least one opening, the second openingexposing the spacers of the at least one gate structure and a surface ofthe active region adjacent to the at least one gate structure.
 2. Themethod of claim 1, wherein selectively etching the second interlayerdielectric layer and the first interlayer dielectric layer causes aremoval of a portion of an upper portion of the hardmask of the at leastone gate structure adjacent to the second opening and a portion of anupper portion of the spacers on the sidewalls of the hardmask to form asecond recess.
 3. The method of claim 1, wherein selectively etching thesecond interlayer dielectric layer and the first interlayer dielectriclayer causes a portion of an upper surface of the hardmask of the atleast one gate structure away from the second opening to be higher thana remaining surface portion of the hardmask in a vicinity of the secondopening, and a portion of the upper surface of the hardmask of the atleast one gate structure in the vicinity of the second opening to belower than a bottom in the middle portion of the first recess of thehardmask.
 4. The method of claim 1, wherein, after processing thehardmask material layer, the hardmask is configured such that a ratio ofa thickness of a portion at a bottom of the first recess in the hardmaskto a thickness of a portion of the second dielectric layer at a samelevel of the bottom of the hardmask is greater than an etch selectivityratio of a material of the hardmask to a material of the seconddielectric layer.
 5. The method of claim 1, wherein the at least onegate structure comprises two adjacent gate structures, and the secondopening is disposed between the two adjacent gate structures andexposing spacers of the two adjacent gate structures adjacent to thesecond opening and a surface of the active region disposed between thetwo adjacent gate structures.
 6. The method of claim 1, whereinprocessing the hardmask material layer comprises performing an overpolish on the hardmask material layer using a chemical mechanicalpolishing process.
 7. The method of claim 1, wherein processing thehardmask material layer comprises: performing a chemical mechanicalpolishing process on the hardmask material layer to form the hardmask onthe metal gate; and etching back the upper surface of the hardmask toform the first recess.
 8. The method of claim 1, wherein selectivelyetching the second interlayer dielectric layer and the first interlayerdielectric layer comprises performing a dry plasma etching based on afluorocarbon gas CxFy, x and y being positive numbers, wherein an etchratio of the third and second dielectric layers to the hardmask and/orthe first dielectric layer is greater than 1 and less than or equal to10.
 9. The method of claim 1, further comprising forming a contactmember extending to the exposed surface portion of the active region.10. The method of claim 1, wherein the spacers and the hardmask comprisea same material.
 11. The method of claim 1, wherein the active region isa fin-shaped active region.
 12. A semiconductor device, comprising: asubstrate structure comprising an active region, a first interlayerdielectric layer on the active region, and a first opening in the firstinterlayer dielectric layer and extending to the active region; at leastone gate structure in the first opening and comprising spacers onsidewalls of the first opening, a gate dielectric layer on the activeregion, a metal gate on the gate dielectric layer, and a hardmask on themetal gate and having a first recess in a middle portion of its uppersurface, the gate dielectric layer, the metal gate, and the hardmaskbeing between the spacers; a second interlayer dielectric layer on thefirst dielectric layer and on at least a portion of the hardmask; and asecond opening adjacent to the at least one gate structure in the firstopening and exposing the spacers and a surface of the active region. 13.The semiconductor device of claim 12, wherein a portion of an upperportion of the hardmask adjacent to the second opening and a portion ofan upper portion of the spacers on the sidewalls of the hardmaskadjacent to the second opening comprises a second recess.
 14. Thesemiconductor device of claim 12, wherein a portion of an upper surfaceof the hardmask away from the first opening is higher than a remainingportion of the upper surface of the hardmask, and a portion of an uppersurface of the hardmask in a vicinity of the first opening is lower thana bottom in the middle portion of the first recess.
 15. Thesemiconductor device of claim 12, wherein the hardmask is configuredsuch that a ratio of a thickness of a portion at a bottom of the firstrecess in the hardmask to a thickness of a portion of the seconddielectric layer at a same level of the bottom of the hardmask isgreater than an etch selectivity ratio of a material of the hardmask toa material of the second dielectric layer.
 16. The semiconductor deviceof claim 12, wherein the first opening comprises two adjacent openings,the at least one gate structure having two adjacent gate structures eachdisposed in one of the two adjacent openings, and the second openingexposes spacers between the two adjacent gate structures and a surfaceof the active region disposed between the two adjacent gate structures.17. The semiconductor device of claim 12, further comprising a contactmember filling the first and second openings and extending to theexposed surface of the active region.
 18. The semiconductor device ofclaim 12, wherein the spacers and the hardmask comprise a same material.19. The semiconductor device of claim 12, wherein the active region is afin-shaped active region.
 20. A semiconductor device, comprising: asubstrate structure comprising: a semiconductor substrate including anactive region; a first gate structure on the active region andcomprising a first gate dielectric layer on the active region, a firstgate portion on the first gate dielectric layer, and a mask layer on thefirst gate portion; and a first dielectric layer on a side surface ofthe gate dielectric layer, on a side surface of the gate portion, and ona side surface of the mask layer, wherein the mask layer and a portionof the first dielectric layer on the side surface of the mask layer forma mask member which comprises a first recess in a middle portion of itsupper surface; an opening adjacent to the first gate structure andexposing the first dielectric layer and a surface portion of the activeregion adjacent to the first gate structure; and a second gate structureon the active region and adjacent and separated from the first gatestructure by the opening, the second structure comprising a second gatedielectric layer on the active region, a second gate portion on thesecond gate dielectric layer, and a hardmask layer on the second gateportion, wherein the second gate structure has a thickness smaller thana thickness of the first gate structure.